![](/img/cover-not-exists.png)
Mechanical and Tribological Properties of Thin Remote Microwave Plasma CVDa-Si:N:C Films from a Single-Source Precursor
Dariusz Bielinski, Aleksander M. Wrobel, Agnieszka Walkiewicz-PietrzykowskaVolume:
13
Language:
english
Pages:
6
DOI:
10.1023/a:1020144313969
Date:
August, 2002
File:
PDF, 165 KB
english, 2002