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Polycrystalline-Silicon LPCVD by Propene-Assisted Silane Pyrolysis: A Study of the Process and the Films
V. G. Erkov, S. F. DevyatovaVolume:
31
Language:
english
Pages:
8
DOI:
10.1023/a:1020282807704
Date:
September, 2002
File:
PDF, 60 KB
english, 2002