Improvements of CMP characteristics using slurry filter and...

Journal of Materials Science: Materials in Electronics 2002 / 12 Vol. 13; Iss. 12

Improvements of CMP characteristics using slurry filter and high-spray bar of de-ionized water

Sang-Yong Kim, Sung-Woo Park, Yong-Jin Seo
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Volume:
13
Language:
english
Pages:
4
DOI:
10.1023/a:1021513601795
Date:
December, 2002
File:
PDF, 974 KB
english, 2002
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