A Three-Dimensional Two-Phase Model for Thermal Plasma...

A Three-Dimensional Two-Phase Model for Thermal Plasma Chemical Vapor Deposition with Liquid Feedstock Injection

David Kolman, Joachim Heberlein, Emil Pfender
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Volume:
18
Language:
english
Pages:
17
DOI:
10.1023/a:1021741310669
Date:
March, 1998
File:
PDF, 1.17 MB
english, 1998
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