A Three-Dimensional Two-Phase Model for Thermal Plasma Chemical Vapor Deposition with Liquid Feedstock Injection
David Kolman, Joachim Heberlein, Emil PfenderVolume:
18
Language:
english
Pages:
17
DOI:
10.1023/a:1021741310669
Date:
March, 1998
File:
PDF, 1.17 MB
english, 1998