PE-CVD of Fluorocarbon/SiO Composite Thin Films Using...

Plasmas and Polymers 1999 / 03 Vol. 4; Iss. 1

PE-CVD of Fluorocarbon/SiO Composite Thin Films Using C4F8and HMDSO

Tatsuru Shirafuji, Yasuo Miyazaki, Yasuaki Hayashi, Shigehiro Nishino
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Volume:
4
Language:
english
Pages:
19
DOI:
10.1023/a:1021803615715
Date:
March, 1999
File:
PDF, 943 KB
english, 1999
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