Tetrachlorosilane Consumption in Radio Frequency Glow...

Plasma Chemistry and Plasma Processing 1998 / 12 Vol. 18; Iss. 4

Tetrachlorosilane Consumption in Radio Frequency Glow Discharge

L. M. Blinov, A. G. Golovkin, L. I. Kaganov, V. B. Oparin, A. A. Razhavski, A. M. Shterenberg, V. V. Volodko, V. I. Zyn
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Pages:
25
DOI:
10.1023/a:1021811316740
Date:
December, 1998
File:
PDF, 1020 KB
english, 1998
Conversion to is in progress
Conversion to is failed