Self-aligned Technology Applied to Planar Power MOSFETs
M. A. Korolev, A. V. Shvets, R. D. TikhonovVolume:
32
Language:
english
Pages:
3
DOI:
10.1023/a:1021853617839
Date:
January, 2003
File:
PDF, 113 KB
english, 2003