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A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon
J. F. Behnke, E. Passoth, C. Csambal, M. Tichý, P. Kudrna, D. Trunec, A. BrablecVolume:
49
Language:
english
Pages:
16
DOI:
10.1023/a:1022816925175
Date:
April, 1999
File:
PDF, 760 KB
english, 1999