Growth Modes of SiOxFilms Deposited by Evaporation and...

Plasmas and Polymers 2003 / 03 Vol. 8; Iss. 1

Growth Modes of SiOxFilms Deposited by Evaporation and Plasma-Enhanced Chemical Vapor Deposition on Polymeric Substrates

G. Dennler, A. Houdayer, P. Raynaud, I. Séguy, Y. Ségui, M. R. Wertheimer
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Volume:
8
Language:
english
Pages:
17
DOI:
10.1023/a:1022865825205
Date:
March, 2003
File:
PDF, 1.04 MB
english, 2003
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