PZT films grown by RF sputtering at high oxygen pressure

Journal of Materials Science Letters 2003 / 03 Vol. 22; Iss. 6

PZT films grown by RF sputtering at high oxygen pressure

O. Blanco, J. Heiras, J. M. Siqueiros, E. Martínez, A. G. Castellanos-Guzmán
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
22
Language:
english
Pages:
5
DOI:
10.1023/a:1022915812773
Date:
March, 2003
File:
PDF, 228 KB
english, 2003
Conversion to is in progress
Conversion to is failed