Uniform Thin Film Electrodeposition onto Large Circular...

Uniform Thin Film Electrodeposition onto Large Circular Wafer Substrates

Hector Ortiz-Ibarra, J. Antonio Medina
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Volume:
34
Language:
english
Pages:
6
DOI:
10.1023/b:jach.0000031167.59649.c0
Date:
July, 2004
File:
PDF, 160 KB
english, 2004
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