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Electroceramic Thick Film Fabrication for MEMS
R.A. Dorey, R.W. WhatmoreVolume:
12
Language:
english
Pages:
14
DOI:
10.1023/b:jecr.0000033999.74149.a3
Date:
January, 2004
File:
PDF, 556 KB
english, 2004