Study of polymer humidity sensor array on silicon wafer
Jing Wang, Kaihe Shi, Lihua Chen, Xiaojun ZhangVolume:
39
Language:
english
Pages:
3
DOI:
10.1023/b:jmsc.0000025847.52357.b8
Date:
May, 2004
File:
PDF, 85 KB
english, 2004