Nanopatterning of diamond films with composite oxide mask...

Journal of Materials Science: Materials in Electronics 2004 / 02 Vol. 15; Iss. 2

Nanopatterning of diamond films with composite oxide mask of metal octylates in electron beam lithography

Shuji Kiyohara, Hideaki Takamatsu, Taku Motoishi, Katsumi Mori
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
15
Language:
english
Pages:
4
DOI:
10.1023/b:jmse.0000005384.49423.0e
Date:
February, 2004
File:
PDF, 227 KB
english, 2004
Conversion to is in progress
Conversion to is failed