Electrical, optical and structural characterization of...

Journal of Materials Science: Materials in Electronics 2004 / 07 Vol. 15; Iss. 7

Electrical, optical and structural characterization of high-k dielectric ZrO2thin films deposited by the pyrosol technique

G. Reyna-García, M. García-Hipólito, J. Guzmán-Mendoza, M. Aguilar-Frutis, C. Falcony
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Volume:
15
Language:
english
Pages:
8
DOI:
10.1023/b:jmse.0000031598.04081.fd
Date:
July, 2004
File:
PDF, 567 KB
english, 2004
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