Microstructural characteristics and carbon content of...

Journal of Materials Science: Materials in Electronics 2004 / 09 Vol. 15; Iss. 9

Microstructural characteristics and carbon content of Al2O3films as a function of deposition parameters

J. Guzmán-Mendoza, M. Garcia-Hipolito, M. Aguilar-Frutis, C. Falcony
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Volume:
15
Language:
english
Pages:
5
DOI:
10.1023/b:jmse.0000036044.89147.8d
Date:
September, 2004
File:
PDF, 321 KB
english, 2004
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