Influence of a Flux of High-Velocity Microparticles on the Parameters of Integrated Circuits Placed Behind a Thick-Walled Obstacle
A. I. Belous, O. A. Dybov, G. S. Romanov, T. V. Petlitskaya, G. I. UsovVolume:
77
Language:
english
Pages:
3
DOI:
10.1023/b:joep.0000045161.32924.c8
Date:
July, 2004
File:
PDF, 77 KB
english, 2004