Growth of silicon thin film by LPE on porous silicon bilayers
A. Fave, M. Bouchaour, A. Kaminski, S. Begrger, A. Ould-Abbas, N. Chabane SariVolume:
76
Language:
english
Pages:
7
DOI:
10.1023/b:jtan.0000028056.35826.e4
Date:
May, 2004
File:
PDF, 358 KB
english, 2004