Polymer-Like C:H Thin Film Coating of Nanopowders in Capacitively Coupled RF Discharge
A. Kouprine, F. Gitzhofer, M. Boulos, A. FridmanVolume:
24
Language:
english
Pages:
27
DOI:
10.1023/b:pcpp.0000013198.39742.38
Date:
June, 2004
File:
PDF, 799 KB
english, 2004