Kinetic model of thin film growth by vapor deposition

The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics 2005 / 09 Vol. 35; Iss. 3

Kinetic model of thin film growth by vapor deposition

B. F. Gordiets, J. L. Andújar, C. Corbella, E. Bertran
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Volume:
35
Language:
english
Pages:
7
DOI:
10.1140/epjd/e2005-00084-x
Date:
September, 2005
File:
PDF, 321 KB
english, 2005
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