The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics
2009 / 08 Vol. 54; Iss. 2
Carbon-free SiOxfilms deposited from octamethylcyclotetrasiloxane (OMCTS) by an atmospheric pressure plasma jet (APPJ)
J. Schäfer, R. Foest, A. Quade, A. Ohl, J. Meichsner, K. D. WeltmannVolume:
54
Language:
english
Pages:
7
DOI:
10.1140/epjd/e2009-00048-2
Date:
August, 2009
File:
PDF, 374 KB
english, 2009