The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics
2009 / 08 Vol. 54; Iss. 2
Computational study of plasma-surface interaction in plasma-assisted technologies
R. Hrach, P. Bartoš, V. HrachováVolume:
54
Language:
english
Pages:
7
DOI:
10.1140/epjd/e2009-00122-9
Date:
August, 2009
File:
PDF, 323 KB
english, 2009