Integrated Optical Displacement Detection and Electrostatic...

IEEE Sensors Journal 2009 Vol. 9; Iss. 12

Integrated Optical Displacement Detection and Electrostatic Actuation for Directional Optical Microphones With Micromachined Biomimetic Diaphragms

Bicen, B., Jolly, S., Jeelani, K., Garcia, C.T., Hall, N.A., Degertekin, F.L., Quang Su, Weili Cui, Miles, R.N.
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Volume:
9
Year:
2009
Language:
english
Pages:
9
DOI:
10.1109/JSEN.2009.2031810
File:
PDF, 2.00 MB
english, 2009
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