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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems -
Sharma, Mrigank, Sarraf, Elie. H., Cretu, EdmondYear:
2011
Language:
english
Pages:
4
DOI:
10.1109/memsys.2011.5734500
File:
PDF, 1.16 MB
english, 2011