Non-destructive characterization of mechanical and structural properties of amorphous diamond-like carbon films
Schneider, D., Meyer, C.F., Mai, H., Schöneich, B., Ziegele, H., Scheibe, H.J., Lifshitz, Y.Volume:
7
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0925-9635(97)00337-3
File:
PDF, 646 KB
english, 1998