Mode transitions in low pressure rare gas cylindrical ICP...

Mode transitions in low pressure rare gas cylindrical ICP discharge studied by optical emission spectroscopy

Czerwiec, T, Graves, D B
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Volume:
37
Year:
2004
Language:
english
Pages:
14
DOI:
10.1088/0022-3727/37/20/009
File:
PDF, 1.92 MB
english, 2004
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