Influence of crystal quality on the excitation and propagation of surface and bulk acoustic waves in polycrystalline AlN films
Clement, M., Olivares, J., Capilla, J., Sangrador, J., Iborra, E.Volume:
59
Year:
2012
Language:
english
Pages:
7
DOI:
10.1109/tuffc.2012.2163
File:
PDF, 635 KB
english, 2012