Three-Dimensional Measurement of Line Edge Roughness in...

Microscopy and Microanalysis 2009 Vol. 15 ; Iss. 3

Three-Dimensional Measurement of Line Edge Roughness in Copper Wires Using Electron Tomography

Ercius, Peter, Gignac, Lynne M., Hu, C.-K., Muller, David A.
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Volume:
15
Year:
2009
Language:
english
DOI:
10.1017/s143192760909028x
File:
PDF, 264 KB
english, 2009
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