Zinc Nitride Films by Reactive Sputtering of Zn in...

MRS Proceedings 2011 Vol. 1324

Zinc Nitride Films by Reactive Sputtering of Zn in N2-Containing Atmosphere

Jiang, Nanke, Georgiev, Daniel G., Jayatissa, Ahalapitiya H., Wen, Ting
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Volume:
1324
Year:
2011
Language:
english
Pages:
1
DOI:
10.1557/opl.2011.965
File:
PDF, 281 KB
english, 2011
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