An analytical model and verification for MEMS Pirani gauges

Santagata, F, Iervolino, E, Mele, L, van Herwaarden, A W, Creemer, J F, Sarro, P M

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Volume:

Year:

2011

Language:

english

DOI:

10.1088/0960-1317/21/11/115007

File:

PDF, 437 KB

english, 2011

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