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An analytical model and verification for MEMS Pirani gauges
Santagata, F, Iervolino, E, Mele, L, van Herwaarden, A W, Creemer, J F, Sarro, P MVolume:
21
Year:
2011
Language:
english
DOI:
10.1088/0960-1317/21/11/115007
File:
PDF, 437 KB
english, 2011