Modelling of an RF plasma shower

Journal of Physics D Applied Physics 2012 Vol. 45; Iss. 14

Modelling of an RF plasma shower

Carbone, E A D, Mihailova, D, Benova, E, Degrez, G, Atanasova, M, van der Mullen, J J A M
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Volume:
45
Year:
2012
Language:
english
DOI:
10.1088/0022-3727/45/14/145202
File:
PDF, 1.20 MB
english, 2012
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