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Influence of the Plasma Sheath on Plasma Polymer Deposition in Advance of a Mask and down Pores
Zelzer, Mischa, Scurr, David, Abdullah, Badr, Urquhart, Andrew J., Gadegaard, Nikolaj, Bradley, James W., Alexander, Morgan R.Volume:
113
Year:
2009
Language:
english
Pages:
8
DOI:
10.1021/jp902137y
File:
PDF, 299 KB
english, 2009