Deep reactive ion etching of borosilicate glass using an...

Deep reactive ion etching of borosilicate glass using an anodically bonded silicon wafer as an etching mask

Akashi, T, Yoshimura, Y
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Volume:
16
Year:
2006
Language:
english
Pages:
6
DOI:
10.1088/0960-1317/16/5/024
File:
PDF, 629 KB
english, 2006
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