Replica Mold for Nanoimprint Lithography from a Novel Hybrid Resin
Lee, Bong Kuk, Hong, Lan-Young, Lee, Hea Yeon, Kim, Dong-Pyo, Kawai, TomojiVolume:
25
Year:
2009
Language:
english
Pages:
9
DOI:
10.1021/la901203e
File:
PDF, 7.10 MB
english, 2009