Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 3
Graphene stripper foils
Pavlovsky, Igor, Fink, Richard L.Volume:
30
Year:
2012
Language:
english
DOI:
10.1116/1.3693594
File:
PDF, 667 KB
english, 2012