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Diagnostics of N2–Ar plasma mixture excited in a 13.56 MHz hollow cathode discharge system: application to remote plasma treatment of polyamide surface
Saloum, S, Naddaf, M, Alkhaled, BVolume:
41
Year:
2008
Language:
english
DOI:
10.1088/0022-3727/41/4/045205
File:
PDF, 362 KB
english, 2008