High Rate Aluminum Sputtering in Compact Disc Production

High Rate Aluminum Sputtering in Compact Disc Production

Dr. Michael Lübbehusen, Reiner Seiler, Eggo Sichmann
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Volume:
7
Year:
1995
Language:
english
Pages:
7
DOI:
10.1002/vipr.19950070306
File:
PDF, 885 KB
english, 1995
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