Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Determination of migration of ion-implanted helium in silica by proton backscattering spectrometry
G. Szakács, E. Szilágyi, F. Pászti, E. KótaiVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.12.002
File:
PDF, 132 KB
english, 2008