Determination of migration of ion-implanted helium in...

Determination of migration of ion-implanted helium in silica by proton backscattering spectrometry

G. Szakács, E. Szilágyi, F. Pászti, E. Kótai
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Volume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.12.002
File:
PDF, 132 KB
english, 2008
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