A simple method for calculation of the pull-in voltage and...

Sensors and Actuators A: Physical 2008 Vol. 141; Iss. 2

A simple method for calculation of the pull-in voltage and touch-point pressure for the small deflection of square diaphragm in MEMS

Anurekha Sharma, P.J. George
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Volume:
141
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2007.10.036
File:
PDF, 484 KB
english, 2008
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