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Preferential growth of thin rutile TiO2 films upon thermal oxidation of sputtered Ti films
Chu-Chi Ting, San-Yuan Chen, Dean-Mo LiuVolume:
402
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(01)01675-3
File:
PDF, 756 KB
english, 2002