![](/img/cover-not-exists.png)
Effect of the substrate bias potential on crystalline grain size, intrinsic stress and hardness of vacuum arc evaporated TiN/c-Si coatings
F.J Espinoza-Beltrán, O Che-Soberanis, L Garcı́a-González, J Morales-HernándezVolume:
437
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)00568-6
File:
PDF, 148 KB
english, 2003