Chemische Dampfphasenabscheidung von neuen Materialien für...

Chemische Dampfphasenabscheidung von neuen Materialien für Sub-50-nm-Transistoren

L. Frey, A. Bauer, H. Ryssel
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Volume:
77
Year:
2005
Language:
german
Pages:
2
DOI:
10.1002/cite.200590331
File:
PDF, 102 KB
german, 2005
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