Combination of glow-discharge and arc plasmas for...

Research on Chemical Intermediates 2001 / 11 Vol. 27; Iss. 9

Combination of glow-discharge and arc plasmas for CF4abatement

Aimin Huang, Guanguang Xia, Franz-Josef Spiess, Xiao Chen, Jeffery Rozak, Steven L. Suib, Tomonori Takahashi, Yuji Hayashi, Hiroshige Matsumoto
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Volume:
27
Language:
english
Pages:
18
DOI:
10.1163/156856701753536697
Date:
November, 2001
File:
PDF, 321 KB
english, 2001
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