Photosensitive Poly(benzoxazole) Based on Poly(o-hydroxy amide), Dissolution Inhibitor, Thermoacid Generator, and Photoacid Generator
Ogura, Tomohito, Yamaguchi, Ko-ta, Shibasaki, Yuji, Ueda, MitsuruVolume:
39
Year:
2007
Language:
english
Pages:
7
DOI:
10.1295/polymj.pj2006174
File:
PDF, 174 KB
english, 2007