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Time-modulated CVD process optimized using the taguchi method
W. Ahmed, E. Ahmed, C. Maryan, M. J. Jackson, A. A. Ogwu, N. Ali, V. F. Neto, J. GracioVolume:
15
Language:
english
Pages:
6
DOI:
10.1361/105994906x95940
Date:
April, 2006
File:
PDF, 257 KB
english, 2006