Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
Kan Li, Hao Jin, De-miao Wang, Yi-fei TangVolume:
10
Language:
english
Pages:
7
DOI:
10.1631/jzus.a0820572
Date:
March, 2009
File:
PDF, 341 KB
english, 2009