An in-plane low-noise accelerometer fabricated with an...

An in-plane low-noise accelerometer fabricated with an improved process flow

Xu-dong Zheng, Zhong-he Jin, Yue-lin Wang, Wei-jun Lin, Xiao-qi Zhou
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Volume:
10
Language:
english
Pages:
8
DOI:
10.1631/jzus.a0820757
Date:
October, 2009
File:
PDF, 352 KB
english, 2009
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