An in-plane low-noise accelerometer fabricated with an improved process flow
Xu-dong Zheng, Zhong-he Jin, Yue-lin Wang, Wei-jun Lin, Xiao-qi ZhouVolume:
10
Language:
english
Pages:
8
DOI:
10.1631/jzus.a0820757
Date:
October, 2009
File:
PDF, 352 KB
english, 2009