Two-dimensional dopant profiling in p+/n junctions using...

Electronic Materials Letters 2010 / 06 Vol. 6; Iss. 2

Two-dimensional dopant profiling in p+/n junctions using scanning electron microscope coupled with selective electrochemical etching

Yeon-Ho Kil, Myeong-Il Jeong, Kyu-Hwan Shim, Hyo-Bong Hong, Hyung-Joong Yun, Seung-Min Kang, Kwang-Soon Ahn, Chel-Jong Choi
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Volume:
6
Language:
english
Pages:
4
DOI:
10.3365/eml.2010.06.055
Date:
June, 2010
File:
PDF, 266 KB
english, 2010
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