Structural characterization of HfNx-based films grown by metal organic chemical vapor deposition
Chang Chun Chen, BenHai Yu, Jiang Feng LiuVolume:
14
Language:
english
Pages:
5
DOI:
10.3365/met.mat.2008.02.099
Date:
February, 2008
File:
PDF, 464 KB
english, 2008