A structural and compositional analysis of a TiOxdiffusion...

Metals and Materials International 2008 / 08 Vol. 14; Iss. 4

A structural and compositional analysis of a TiOxdiffusion barrier for indium tin oxide/Si contacts

Young-Woo Ok, Won-Kyu Park, Hyun-Mi Kim, Ki-Bum Kim, Donghwan Kim
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Volume:
14
Language:
english
Pages:
5
DOI:
10.3365/met.mat.2008.08.481
Date:
August, 2008
File:
PDF, 692 KB
english, 2008
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